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Molecular Flow Controller (PMFC-100)

It is a device that can introduce various gases with known flow rates into a vacuum container (joint research with the National Institute of Advanced Industrial Science and Technology).

- It is possible to introduce a known flow rate of almost any gas (including mixed gases) into a vacuum container, etc. - The flow rate is proportional to the upstream pressure. - It is easy to generate various flow rates (conductance is constant with respect to primary pressure). - There is little temperature dependence.

  • Analytical Equipment and Devices
  • Molecular Flow Controller

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